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important role in wafer processing. Robots are used to
physically move wafers through the process and can be
counted on the make precise, reliable movements.
However, like other equipment, preventive or failure based
maintenance support must be provided. |
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Handling Robots in a Class 100 Cleanroom |
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Cleanroom Lift for
extracting robots out of semiconductor equipment
with tight constraints. |
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The robot must be extracted from an area for
maintenance. |
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end-effector goes through a small entrance to
grasp the robot. |
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After lifting the robot the area height, it
rotates 90 degrees. |
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Robot is positioned to be extracted through the
window. |
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The power gripper then pull the robot through
the window. |
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Contact Us: |
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Email us |
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770-489-0328 |
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Send a brief inquiry of your equipment needs.
A member of our staff will contact you
shortly. |
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